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Автоматизация технологического оборудования микроэлектроники
Добавил: kulikov_a / 11-04-2017, 13:43 /

Название: Автоматизация технологического оборудования микроэлектроники
Автор: А. А. Сазонов
Издательство: Москва "Высшая школа"
Год: 1991
Формат: pdf
Страниц: 336
Размер: 15,49 Мб
Язык: русский

В книге рассматриваются вопросы разработки систем управления основными технологическими процессами интегральных микросхем, в том числе вопросы моделирования и идентификации технологического оборудования, разработки информационно-измерительных систем, управляющих и исполнительных устройств, а также системы управления некоторых конкретных технологических процессов и технологического микроклимата.

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