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Категория: КНИГИ » ТЕХНИЧЕСКИЕ НАУКИ
Автоэмиссионные наноструктуры и приборы на их основе
Добавил: RS / 6-07-2016, 20:44 /

Название: Автоэмиссионные наноструктуры и приборы на их основе
Автор: Татаренко Н.И., Кравченко В.Ф.
Издательство: Физматлит
ISBN: 5-9221-0695-3
Год издания: 2006
Страниц: 192
Язык: Русский
Формат: djvu
Размер: 3.67 Мб

В книге дан анализ современного состояния и тенденций развития вакуумной микро- и наноэлектроники. Рассмотрены физико-химические основы процесса создания нового класса автоэмиссионных наноструктур на базе нанопористого анодного оксида алюминия. Приведены результаты исследований их геометрических параметров, элементного состава и эмиссионных характеристик. Представлена принципиально новая интегральная технология создания наноструктурных автоэлектронных микроприборов и систем их межсоединений на основе тонких пленок вентильных металлов и их анодных оксидов. Изложены физические основы процедуры моделирования и расчета характеристик этих микроприборов. Приведены их экспериментальные и расчетные характеристики.
Предназначается для научных и инженерно-технических работников, аспирантов и студентов старших курсов, специализирующихся в области физической электроники, микро- и наноэлектроники.

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